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Grazing Incidence X-Ray Fluorescence Analysis using Synchrotron Radiation

Published online by Cambridge University Press:  06 March 2019

Atsuo Iida*
Affiliation:
Photon Factory National Laboratory for High Energy Physics O-ho, Tsukuba-shi, Ibaraki, 305 Japan
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Abstract

The X-ray fluorescence analysis of a trace element under a grazing incidence condition has been developed using synchrotron radiation. The interference effect plays an important role for determining the depth distribution of the elemental concentration. The elemental distribution above, on or below the material surface has been studied. The glancing angle dependence of the X-ray fluorescence signal around the critical angle strongly reflects the elemental distribution, and can be used to determine the position of the element of interest.

Information

Type
XI. Thin-Film and Surface Characterization by XRS and XPS
Copyright
Copyright © International Centre for Diffraction Data 1991

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