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Instrumentation for Electron Probe Microanalysis

Published online by Cambridge University Press:  06 March 2019

David B. Wittry
David B. Wittry*
Affiliation:
Applied Research Laboratories Glendale, California
*
* Present address: University of Southern California, University Park, Los Angeles, California.
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Abstract

Since the development of the first practical electron probe microanalyzer by Castaing and Guinier in 1951, approximately 14 such instruments have been placed in operation throughout the world and at least 15 more are under construction. All of the existing instruments contain the following basic components: (1) An electron beam system, (2) a movable specimen stage, (3) a means for viewing the surface of the specimen, and (4) an X-ray analyzer. The integration of these components into a practical instrument requires certain compromises in the performance capability of the instrument. A critical evaluation of the various approaches to this problem is given and a new electron objective lens is described which results in fewer restrictions on the over-all performance. The basic design of an instrument employing this lens, which will be manufactured by the Applied Research Laboratories, is discussed.

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Type
Research Article
Information
Advances in X-Ray Analysis , Volume 3: Eighth Annual Conference on Applications of X-ray Analysis, August 12-14, 1959 , 1959 , pp. 185 - 195
Copyright
Copyright © International Centre for Diffraction Data 1959

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