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An Automated X-Ray MicroFluorescence Materials Analysis System

Published online by Cambridge University Press:  06 March 2019

David C. Wherry
Affiliation:
Kevex Corp. Foster City, CA
Brian J. Cross
Affiliation:
Kevex Corp. Foster City, CA
Thomas H. Briggs
Affiliation:
AT&T Network Systems Allentown, PA
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Extract

Recently there has been a growing interest in the field of X-Ray MicroFluorescence (XRMF) for analyzing small areas (with sizes greater than about 10 microns diameter). Several recent papers have described prototype systems for this kind of analysis, with particular emphasis on the elemental imaging applications. However, the technique of small-area XRF analysis is not new. For example, Bertin gives an excellent review of much of the earlier work (up to the late 1960s), which used a variety of focusing (with curved crystals) or collimation techniques. Several wavelength dispersive spectrometer systems were modified for small-spot analysis. One of the earliest spectrometers was the X-ray Milliprobe developed by Adler and Axelrod, which employed curved crystals.

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Type
I. Microbeam Techniques and Imaging Methods for Materials Characterization
Copyright
Copyright © International Centre for Diffraction Data 1987

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