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Glancing Angle X-ray Absorption Spectroscopy

Published online by Cambridge University Press:  06 March 2019

G. N. Greaves
G. N. Greaves*
Affiliation:
SERC Daresbury Laboratory, Warrington WA4 4AD, UK and Department of Chemistry, University of Keele, Keele Staffs. ST5 5BG, UK
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Abstract

The use of glancing angles of incidence enables X-ray Absorption Spectroscopy to be measured as a function of depth from the surface of a material into the bulk. As x-rays rather than photoelectrons are detected, a UHV environment is not required and instead surfaces and interfaces can be examined under realistic operational conditions. Whilst the reflected beam carries the fine structure of concentrated species in the imaginary part of the refractive index, this is obscured by the contribution from the real part for angles greater than ϕc, the critical angle for total external reflection. Measuring the x-ray fluorescence offers more flexibility, particularly for dilute systems. The use of synchrotron radiation in conjunction with a multi-element Solid State Detector enables impurity loadings down to a few 1019 cm-3 to be measured which for ion implants is equivalent to around half-monolayer coverage at the surface. This sensitivity makes it practical to examine impurities in semiconductors at realistic dopant levels.

Information

Type
I. Surface and Near-Surface X-Ray Spectroscopy
Information
Advances in X-Ray Analysis , Volume 34: Thirty-Ninth Annual Conference on Applications of X-ray Analysis, July 30 - August 3, 1990 , 1990 , pp. 13 - 22
Copyright
Copyright © International Centre for Diffraction Data 1990

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References

1. Parratt, L. G., 1954, Phys. Rev., 95:359 Google Scholar
2. Greaves, G. N. and Catlow, C. R. A. in Applications of Synchrotron Radiation’ (Blackie, London and New York (1990) p1.Google Scholar
3. Sayers, D. E. Stem, E. A. and Lytle, F. W., 1970, Adv. X-ray Analysis, 13:243; Lea P. A and Pendry J. B, 1975, Phys. Rev., B11: 2795.Google Scholar
4. Schwenke, H., Bemeike, W., Knoth, J. and Weisbrod, U., 1989, Adv. X-ray Analysis, 32:105; Klockenkamper R, 1990, Spectroscopy, 5:26; Wobrauschek .P, Kregsamer .P, Steli .C and Aiginger H., 1990, These proceedings.Google Scholar
5. Pizzini, S., Roberts, K. J. Greaves, G. N. Harris, N. Moore, P. and Pantos, E., 1989, Rev. Sci. Instrum., 60: 2525.Google Scholar
6. Greaves, G. N. Diakun, G. P., Quinn, P. D., Hart, M. and Siddons, D. P., 1983, Nucl. Inst. Methods, A208: 335.Google Scholar
7. Derbyshire, G. E. Farrow, R. C. Bilsboirow, R. L. Morrell .C and Greaves, G. N. 1990, These proceedings.Google Scholar
8. Greaves, G. N. Barrett, N. T. Antonini, G. M. Thornley, F. R. Willis, B. T. M. and Steel, A., 1989, J. Am. Chem. Soc., 111: 4313.Google Scholar
9. Barrett, N. T. Gibson, P. N. Greaves, G. N. Mackle, P., Roberts, K. J. and Sacchi, M., 1989, J. Phys. D, 22: 542.Google Scholar
10. Pizzini, S., Roberts, K. J. Dring, I. S. Oldman, P. J and Greaves, G. N. 1989, Physica B, 158: 676.Google Scholar
11. Martens, G. and Rabe, P., 1980, Phys. Status Solidi, 58: 415.Google Scholar
12. Barrett, N. T. Greaves, G. N. Pizzini, S. and Roberts, K. J. 1990, Surface Science, 227: 337.Google Scholar
13. Pizzini, S., Roberts, K. J. Greaves, G. N. Barrett, N. T. Dring, I. and Oldman, R. J. 1990, Faraday Society Discussion 89 (in press).Google Scholar
14. Jaklevic, J., Kirby, J. H. Klein, M. P. Robertson, A. I. Brown, G. S and Eisenberger, P., 1977, Solid State Commun., 23:679; Heald S. M, Keller E and Stern E. A, 1985, Phys. Lett. A 103: 155.Google Scholar
15. Greaves, G. N. 1990, J. Non-Cryst. Solids, 120: 108.Google Scholar
16. Greaves, G. N. Kalbitzer, S., Müller, G., Pizzini, S. and Roberts, K. J., 1990, II Nuovo Cimento (in press).Google Scholar
17. Spear, W. E. and LeComber, P. G., 1975, Solid State Commun., 17: 1193.Google Scholar
18. Street, R. A. Biegelsen, D. K. and Knights, J. C., 1981, Phys. Rev., B24: 969.Google Scholar
19. Street, R. A., 1985, J. Non-Cryst. Solids, 77 and 78: 1.Google Scholar
20. Street, R. A., 1982, Phys. Rev. Lett., 49: 1187.Google Scholar
21. Müller, G., Kalbitzer, S. and Mannsperger, H., 1986, Appl. Phys. A39: 243.Google Scholar