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The composition and structure of SIPOS: A high spatial resolution electron microscopy study

Published online by Cambridge University Press:  03 March 2011

M. Catalano,
M.J. Kim,
R.W. Carpenter,
Das K. Chowdhury and
Joe Wong
M. Catalano
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, Arizona 85287-1704
M.J. Kim
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, Arizona 85287-1704
R.W. Carpenter
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, Arizona 85287-1704
Das K. Chowdhury
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, Arizona 85287-1704
Joe Wong
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, Arizona 85287-1704
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Abstract

The nanostructure and chemical distribution in semi-insulating polycrystalline oxygen-doped silicon (SIPOS) deposited on (001) Si and its isothermal transformation behavior at 900 °C were investigated by high resolution electron microscopy (HREM) and electron energy loss nanospectroscopy (EELS). The structure of the as-deposited film, which contained 15 at. % oxygen, was amorphous. No evidence for nanocrystalline second phases was found. It was similar in appearance to amorphous silicon. After annealing for 30 min at 900 °C in an inert environment (N2), a dispersion of small nanocrystals, identified as silicon by imaging, diffraction and EELS, formed in the amorphous SIPOS matrix, with a thin precipitate free zone (PFZ) adjacent to the Si substrate. The SIPOS matrix oxygen concentration increased to 36 at. % and the matrix remained amorphous after annealing. No other phases were observed in annealed specimens. Changes in Si–L near edge fine structure and low loss peaks in EELS spectra from SIPOS with increasing oxygen concentration indicated that it is a solid solution supersaturated with silicon. Microstructures indicated that the Si nanocrystals formed during a homogeneous precipitation reaction.

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Articles
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Journal of Materials Research , Volume 8 , Issue 11 , November 1993, pp. 2893 - 2901
Copyright
Copyright © Materials Research Society 1993

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