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Strain-controlled bulge test

Published online by Cambridge University Press:  31 January 2011

B. Erdem Alaca,
K. Bugra Toga,
Orhan Akar and
Tayfun Akin
B. Erdem Alaca*
Affiliation:
College of Engineering, Koc University, Rumeli Feneri Yolu 34450 Sariyer, Istanbul, Turkey
K. Bugra Toga
Affiliation:
College of Engineering, Koc University, Rumeli Feneri Yolu 34450 Sariyer, Istanbul, Turkey
Orhan Akar
Affiliation:
Electrical and Electronics Engineering Department, Middle East Technical University, 06531 Ankara, Turkey
Tayfun Akin
Affiliation:
Electrical and Electronics Engineering Department, Middle East Technical University, 06531 Ankara, Turkey
*
a)Address all correspondence to this author. e-mail: ealaca@ku.edu.tr
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Abstract

A closed-loop approach is adopted to implement strain rate control during the bulge test. Due to the difficulty of measuring strains directly, the technique is based on the conversion of displacement measurements to the corresponding strains using the plane-strain formulation. The necessary temporal evolution of the midpoint displacement of a rectangular diaphragm is derived under the condition of constant strain rate and is imposed as a control criterion. The technique is demonstrated on 500-nm-thick Au diaphragms by applying strain rates ranging from 2 × 10−6 to 2 × 10−4 s–1. By measuring the corresponding yield strength values, a strain rate sensitivity of 0.11 is obtained, which is close to what was previously reported on similar specimens using the microbending test.

Keywords

AuElastic propertiesMicroelectro-mechanical (MEMS)

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Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 12: Biomimetic and Bio-enabled Materials Science and Engineering , December 2008, pp. 3295 - 3302
Copyright
Copyright © Materials Research Society 2008

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References

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