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Fabrication of Sr2Nb2O7 thin films by sol-gel processing

Published online by Cambridge University Press:  03 March 2011

Alamanda V. Prasadarao,
Ulagaraj Selvaraj and
Sridhar Komarnenici
Alamanda V. Prasadarao*
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
Ulagaraj Selvaraj*
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
Sridhar Komarnenici*
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
*
a)Present address: School of Chemistry, Andhra University, AP 530003, India.
b)Present address: Partculate Materials Center, The Pennsylvania State University, University Park, Pennsylvania 16802.
c)Also with the Department of Agronomy.
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Abstract

Sol-gel Sr2Nb2O7 thin films were deposited on Si(100) and Pt-coated Si substrates for the first time by spin-coating. The Sr2Nb2O7 precursor solution was prepared from strontium metal dissolved in 2-methoxyethanol, acetylacetone, and niobium ethoxide. The formation of phase pure Sr2Nb2O7 occurred via an intermediate perovskite phase of composition close to Sr0.82NbO3. Crack-free Sr2Nb2O7 films of ∼0.4 μm thickness were deposited on these substrates using a single-coating followed by heat treatment at 850 °C for 12 h. SEM microstructure and thin film XRD results indicated the deposition of a grain-oriented film on the Pt-coated Si substrate. The room temperature dielectric constant and the loss values of the film measured at 10 kHz are 45 and 0.045, respectively.

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Type
Articles
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Journal of Materials Research , Volume 10 , Issue 3 , March 1995, pp. 704 - 707
Copyright
Copyright © Materials Research Society 1995

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