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Cavity-hollow cathode-sputtering source for titanium films

Published online by Cambridge University Press:  22 January 2010

R. SCHRITTWIESER,
C. IONITA,
A. MURAWSKI,
C. MASZL,
M. ASANDULESA,
A. NASTUTA,
G. RUSU,
C. DOUAT,
S. B. OLENICI and
I. VOJVODIC
...Show all authors
R. SCHRITTWIESER
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria (Roman.Schrittwieser@uibk.ac.at)
C. IONITA
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria (Roman.Schrittwieser@uibk.ac.at)
A. MURAWSKI
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria (Roman.Schrittwieser@uibk.ac.at)
C. MASZL
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria (Roman.Schrittwieser@uibk.ac.at)
M. ASANDULESA
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
A. NASTUTA
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
G. RUSU
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
C. DOUAT
Affiliation:
UFR des Sciences, Université Paris Sud 11, Orsay Cedex, France
S. B. OLENICI
Affiliation:
ISAS – Institute for Analytical Sciences, Dortmund, Germany
I. VOJVODIC
Affiliation:
Faculty of Natural Sciences and Mathematics, University of Montenegro, Podgorica, Montenegro
M. DOBROMIR
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
D. LUCA
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
S. JAKSCH
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria (Roman.Schrittwieser@uibk.ac.at)
P. SCHEIER
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria (Roman.Schrittwieser@uibk.ac.at)
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Abstract

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A cavity-hollow cathode was investigated as low-cost sputtering source for titanium. An argon discharge is produced inside a hollow cathode consisting of two specifically formed disks of titanium. An additional cavity further enhances the pendulum effect of the electrons. Measurements with small Langmuir probes yielded evidence for the formation of a space charge double layer above the cathode. The sputtered atoms form negatively charged clusters. After further acceleration by the double layer the clusters impinge on the substrates. Titanium thin films were produced on highly oriented pyrolytic graphite. The films were investigated by a scanning tunnel microscope and X-ray photoelectron spectroscopy.

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