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Effects of Processing Parameters on Zinc Oxide Thin Films Prepared by Single Solution Deposition

Published online by Cambridge University Press:  11 May 2016

Manuel F. Martinez,
Shaimum Shahriar,
Donato Kava,
Cheik Sana,
Vanessa Castaneda,
Jose Galindo and
Deidra R. Hodges
Manuel F. Martinez
Affiliation:
Electrical and Computer Engineering, The University of Texas at El Paso, El Paso, TX 79968, U.S.A.
Shaimum Shahriar
Affiliation:
Electrical and Computer Engineering, The University of Texas at El Paso, El Paso, TX 79968, U.S.A.
Donato Kava
Affiliation:
Electrical and Computer Engineering, The University of Texas at El Paso, El Paso, TX 79968, U.S.A.
Cheik Sana
Affiliation:
Electrical and Computer Engineering, The University of Texas at El Paso, El Paso, TX 79968, U.S.A.
Vanessa Castaneda
Affiliation:
Electrical and Computer Engineering, The University of Texas at El Paso, El Paso, TX 79968, U.S.A.
Jose Galindo
Affiliation:
Electrical and Computer Engineering, The University of Texas at El Paso, El Paso, TX 79968, U.S.A.
Deidra R. Hodges*
Affiliation:
Electrical and Computer Engineering, The University of Texas at El Paso, El Paso, TX 79968, U.S.A.
*
*(Email: drhodges@utep.edu)
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Abstract

Zinc oxide thin films were prepared via the sol-gel spin-coating method with the use of a spin processor. The film’s annealing parameters were varied to study their impact on the final film morphology and electrical properties. Characterization of the structural properties of the samples was carried on a X-ray diffractometer (XRD) and scanning electron microscopy. Electrical characterization was obtained with the use of a four point probe. Optical characterization of the samples was carried on a UV-Vis-NIR Spectrophotometer. Samples annealed under a cover are observed to have a higher transmission percentage on the visible light range while having a very small grain size and small relative resistivity. Samples annealed under standard atmospheric conditions show a larger grain size and resistivity, and correlated to it, a smaller transmission percentage. Samples annealed under vacuum prove to have a much more reduced optical, electrical, and structural properties when compared to the rest of the samples.

Keywords

optical propertiesmorphologyelectrical properties

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Type
Articles
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MRS Advances , Volume 1 , Issue 47: Electronics and Photonics , 2016, pp. 3199 - 3205
Copyright
Copyright © Materials Research Society 2016 

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References

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