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Designing for MEMS Reliability

Published online by Cambridge University Press:  31 January 2011

Susanne Arney
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Extract

Microelectromechanical systems (MEMS) devices are being manufactured in the hundreds of millions and are widely deployed for pressure sensor, accelerometer, display, and printing applications. This suggests customer confidence in the longterm reliability of MEMS (also known as microsystems or micromachines) under diverse stringent conditions.

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Research Article
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MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 296 - 299
Copyright
Copyright © Materials Research Society 2001

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