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Microsystems for Chemical and Biological Applications

Published online by Cambridge University Press:  31 January 2011

Duane Lindner
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Extract

Over the past decade, there has been an explosive growth in efforts directed at developing and utilizing an array of novel microsystems in important applications in chemistry and biology. In parallel, the commercial potential of these applications has fueled the creation of hundreds of new companies and the expansion of research and development efforts at established commercial organizations. In this article, we outline the spectrum of applications of these systems and highlight some of the materials and fabrication challenges that they present.

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Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001, pp. 333 - 336
Copyright
Copyright © Materials Research Society 2001

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