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Microsystems Technology (MST) and MEMS Applications: An Overview

Published online by Cambridge University Press:  31 January 2011

Job Elders ,
Vincent Spiering  and
Steve Walsh
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Extract

Microelectromechanical systems (MEMS), microsystems technology (MST), and micromachines are roughly synonymous terms applied in the United States, Europe, and Japan, respectively, for manufacturing technologies that are enabling miniaturization and the development of useful products.

Information

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 312 - 315
Copyright
Copyright © Materials Research Society 2001

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References

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