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Surface Micromachining: A Brief Introduction

Published online by Cambridge University Press:  31 January 2011

Mehran Mehregany  and
Christian A. Zorman
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Extract

The rapid expansion of microelectromechanical systems (MEMS) into new application areas is due in large part to the development of surface-micromachining techniques that allow the fabrication of a wide variety of MEMS devices with structural components that can execute motion in at least one direction.

Information

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 289 - 290
Copyright
Copyright © Materials Research Society 2001

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References

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