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Three-Dimensional Microfabrication by Two-Photon Lithography

Published online by Cambridge University Press:  31 January 2011

Da Yang ,
Shalin J. Jhaveri  and
Christopher K. Ober
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Abstract

The controlled formation of submicrometer-scale structures in three dimensions is of increasing interest in many applications. Not intended to produce the smallest structures, but instead aimed at complex topographies, two-photon lithography is an intrinsic 3D lithography technique that enables the fabrication of structures difficult to access by conventional single-photon processes with far greater spatial resolution than other 3D microfabrication techniques. By tightly focusing a femtosecond laser beam into a resin, subsequent photo-induced reactions such as polymerization occur only in the close vicinity of the focal point, allowing the fabrication of a 3D structure by directly writing 3D patterns. The current research effort in two-photon lithography is largely devoted to the design and synthesis of high-efficiency photoinitiators and sensitizers, as well as the development of new materials and systems. This article provides an overview of the progress in two-photon processes for the formation of complex images and the development of patterned structures.

Keywords

microfabricationlithography.

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Type
Research Article
Information
MRS Bulletin , Volume 30 , Issue 12: Fabrication of Sub-45-nm Device Structures , December 2005 , pp. 976 - 982
Copyright
Copyright © Materials Research Society 2005

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