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Atom-Probe Tomographic Studies of Thin Films and Multilayers

Published online by Cambridge University Press:  02 March 2012

David J. Larson,
Alfred Cerezo,
Jean Juraszek,
Kazuhiro Hono and
Guido Schmitz
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Abstract

This article reviews investigations of the growth and reactions within thin metal and oxide films using atom-probe tomography. Included in this review are (1) studies of interfacial and growth reactions in magnetoresistive metallic, metal/oxide, and magnetic magnetostrictive multilayers; (2) comparison of selected portions of these results to simulated film growth using molecular dynamics; and (3) study of the origin of room-temperature ferromagnetism in dilute magnetic semiconductors. Information of this type is useful in order to understand the formation and thermal evolution of thin films (and to compare to theory and modeling) and, ultimately, to permit further optimization of devices based on thin films.

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MRS Bulletin , Volume 34 , Issue 10 , October 2009, pp. 732 - 737
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Copyright © Materials Research Society 2009

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References

1.Müller, E.W., Panitz, J.A., McLane, S.B., Rev. Sci. Instrum. 39, 83 (1968).CrossRefGoogle Scholar
2.Miller, M.K., Cerezo, A., Hetherington, M.G., Smith, G.D.W., Atom Probe Field Ion Microscopy (Oxford University Press, Oxford, 1996).CrossRefGoogle Scholar
.3.Blavette, D., Bostel, A., Sarrau, J.M., Deconihout, B., Menand, A., Nature 363, 4932 (1993).CrossRefGoogle Scholar
4.Miller, M.K., Atom Probe Tomography: Analysis at the Atomic Level (BW). (Kluwer Academic/Plenum Publishers, New York, 2000).CrossRefGoogle Scholar
5.Heinonen, O.G., Singleton, E.W., Karr, B.W., Gao, Z.C., Cho, H.S., Chen, Y., IEEE Trans. Magn. 44, 2465 (2008).CrossRefGoogle Scholar
6.Ene, C., Schmitz, G., Kircheim, R., Hütten, A., Acta Mater. 53, 3383 (2005).CrossRefGoogle Scholar
7.Stender, P., Ene, C.B., Galinski, H., Schmitz, G., Int. J. Mater. Res. 99, 480 (2008).CrossRefGoogle Scholar
8.Cahn, J.W., Hilliard, J.E., J. Phys. Chem. 28, 258 (1958).CrossRefGoogle Scholar
9.Vovk, V., Schmitz, G., Kirchheim, R., Phys. Rev. B: Condens. Matter 69, 104102 (2004).CrossRefGoogle Scholar
10.Pasichnyy, M.O., Schmitz, G., Gusak, A.M., Vovk, V., Phys. Rev. B: Condens. Matter 72, 014118 (2005).CrossRefGoogle Scholar
11.Desré, P.J., Yavari, A.R., Phys. Rev. Lett. 64, 1533 (1990).CrossRefGoogle Scholar
12.Gusak, A.M., Ukr. Fiz. Zh. 35, 725 (1990).Google Scholar
13.Yin, Y., Rioux, R.M., Erdonmez, C.K., Hughes, S., Somorjai, G.A., Alivisatos, A.P., Science 304, 711 (2004).CrossRefGoogle Scholar
14.Gusak, A.M., Zaporozhets, T.V., Tu, K.N., Gösele, U., Philos. Mag. 85, 4445 (2005).CrossRefGoogle Scholar
15.Ene, C.B., Schmitz, G., Al-Kassab, T.A., Kirchheim, R., Ultramicroscopy 107, 802 (2007).CrossRefGoogle Scholar
16.Ene, C.B., Nowak, C., Oberdorfer, C., Schmitz, G., Ultramicroscopy 109, 660 (2009).CrossRefGoogle Scholar
17.Schmitz, G., Ene, C.B., Nowak, C., Acta Mater. 57, 2673 (2009).CrossRefGoogle Scholar
18.Chiaramonti, A.N., Schreiber, D.K., Egelhoff, W.F., Seidman, D.N., Petford-Long, A.K., Appl. Phys. Lett. 93, 103113 (2008).CrossRefGoogle Scholar
19.Petford-Long, A.K., Ma, Y.Q., Cerezo, A., Larson, D.J., Singleton, E.W., Karr, B.W., J. Appl. Phys. 98, 124904/1 (2005).CrossRefGoogle Scholar
20.Petford-Long, A.K., Larson, D.J., Cerezo, A., Clifton, P.H., Pinitsoontorn, S., Microsc. Microanal. 12, 982CD (2006).CrossRefGoogle Scholar
21.Cerezo, A., Petford-Long, A.K., Larson, D.J., Pinitsoontorn, S., Singleton, E.W., J. Mater. Sci. 41, 7843 (2006).CrossRefGoogle Scholar
22.Zhou, X.W., Wadley, H.N.G., Wang, D.X., Comput. Mater. Sci. 39, 794 (2007).CrossRefGoogle Scholar
23.Delpha, D., Mahieu, S., Eds., Reactive Sputter Deposition, Springer Series in Materials Science (Springer, Berlin, 2008), vol. 109.Google Scholar
24.Zhou, X.W., Wadley, H.N.G., Phys. Rev. B: Condens. Matter 71, 054418/1 (2005).Google Scholar
25.Quan, J.J., Zhou, X.W., Wadley, H.N.G., Surf. Sci. 600, 4537 (2006).CrossRefGoogle Scholar
26.Quan, J.J., Zhou, X.W., Wadley, H.N.G., Surf. Sci. 600, 2275 (2006).CrossRefGoogle Scholar
27.Murdick, D.A., Wadley, H.N.G., Zhou, X.W., Phys. Rev. B: Condens. Matter 75, 125318 (2007).CrossRefGoogle Scholar
28.Drautz, R., Zhou, X.W., Murdick, D.A., Gillespie, B., Wadley, H.N.G., Pettifor, D.G., Progr. Mater. Sci. 52, 196 (2007).CrossRefGoogle Scholar
29.Zhou, X.W., Wadley, H.N.G., Johnson, R.A., Larson, D.J., Tabat, N., Cerezo, A., Petford-Long, A.K., Smith, G.D.W., Clifton, P.H., Martens, R.L., Kelly, T.F., Acta Mater. 49, 4005 (2001).CrossRefGoogle Scholar
30.Larson, D.J., Petford-Long, A.K., Ma, Y.Q., Cerezo, A., Acta Mater. 52, 2847 (2004).CrossRefGoogle Scholar
31.Larson, D.J., Petford-Long, A.K., Cerezo, A., Smith, G.D.W., Acta Mater. 47, 4019 (1999).CrossRefGoogle Scholar
32.Schleiwies, J., Schmitz, G., Heitmann, S., Hütten, A., Appl. Phys. Lett. 78, 3439 (2001).CrossRefGoogle Scholar
33.Ladwig, P.F., Olson, J.D., Bunton, J.H., Larson, D.J., Ulfig, R.M., Martens, R.L., Gribb, T.T., Kelly, T.F., Bonsager, M.C., Schultz, A.E., Pant, B.B., Chang, Y.A., Appl. Phys. Lett. 87, 1 (2005).Google Scholar
34.Larson, D.J., Clifton, P.H., Tabat, N., Cerezo, A., Petford-Long, A.K., Martens, R.L., Kelly, T.F., Appl. Phys. Lett. 77, 726 (2000).CrossRefGoogle Scholar
35.Eckl, T., Reiss, G., Brückl, H., Hoffmann, H., J. Appl. Phys. 75, 362 (1994).CrossRefGoogle Scholar
36.Kudrnovsky, J., Drchal, V., Turek, I., Blaas, C., Weinberger, P., Bruno, P., Surf. Sci. 454–456, 918 (2000).CrossRefGoogle Scholar
37.Wadley, H.N.G., Zhou, X.W., Johnson, R.A., Neurock, M., Progr. Mater. Sci. 46, 329 (2001).CrossRefGoogle Scholar
38.Zhou, X.W., Wadley, H.N.G., J. Appl. Phys. 84, 2301 (1998).CrossRefGoogle Scholar
39.Quandt, E., Ludwig, A., Betz, J., Mackay, K., Givord, D., J. Appl. Phys. 81, 5420 (1997).CrossRefGoogle Scholar
40.Tiercelin, N., Youssef, J.B., Preobrazhensky, V., Pernod, P., Gall, H.L., J. Magn. Magn. Mater. 249, 519 (2002).CrossRefGoogle Scholar
41.Grenier, A., Lardé, R., Cadel, E., J.Breton, M.L., Juraszek, J., Vurpillot, F., Tiercelin, N., Pernod, P., Teillet, J., J. Magn. Magn. Mater. 310, 2215 (2007).CrossRefGoogle Scholar
42.Grenier, A., Lardé, R., Cadel, E., Vurpillot, F., Juraszek, J., Teillet, J., Tiercelin, N., J. Appl. Phys. 102, 033912/1 (2007).CrossRefGoogle Scholar
43.Ohno, H., J. Magn. Magn. Mater. 200, 110 (1999).CrossRefGoogle Scholar
44.Sasaki, T., Sonoda, S., Yamamoto, Y., Suga, K., Shimizu, S., Kindo, K., Hori, H., J. Appl. Phys. 91, 7911 (2002).CrossRefGoogle Scholar
45.Matsumoto, Y., Murakami, M., Shono, T., Hasegawa, T., Fukumura, T., Kawasaki, M., Ahmet, P., Chikyow, T., Koshihara, S., Koinuma, H., Science 291, 854 (2001).CrossRefGoogle Scholar
46.Ueda, K., Tabata, H., Kawai, T., Appl. Phys. Lett. 79, 988 (2001).CrossRefGoogle Scholar
47.Saito, H., Zayets, V., Yamagata, S., Ando, K., Phys. Rev. Lett. 90, 207202/1 (2003).Google Scholar
48.Dietl, T., Ohno, H., Matsukura, F., Cibert, J., Ferrand, D., Science 287, 1019 (2000).CrossRefGoogle Scholar
49.Jungwirth, T., Wang, K.Y., Maek, J., Edmonds, K.W., König, J., Sinova, J., Polini, M., Goncharuk, N.A., MacDonald, A.H., Sawicki, M., Rushforth, A.W., Campion, R.P., Zhao, L.X., Foxon, C.T., Gallagher, B.L., Phys. Rev. B: Condens. Matter 72, 165204/1 (2005).CrossRefGoogle Scholar
50.Grandidier, B., Nys, J.P., Delerue, C., Stievenard, D., Higo, Y., Tanaka, M., Appl. Phys. Lett. 77, 4001 (2000).CrossRefGoogle Scholar
51.Tsuruoka, T., Tanimoto, R., Tachikawa, N., Ushioda, S., Matsukura, F., Ohno, H., Solid State Commun. 121, 79 (2002).CrossRefGoogle Scholar
52.Gleason, J.N., Hjelmstad, M.E., Dasika, V.D., Goldman, R.S., Fathpour, S., Charkrabarti, S., Bhattacharya, P.K., Appl. Phys. Lett. 86, 011911/1 (2005).CrossRefGoogle Scholar
53.Fay, M.W., Han, Y., Brown, P.D., Edmonds, K.W., Wang, K., Gallagher, B.L., Campion, R.P., Foxon, C.T., Philos. Mag. Lett. 86, 395 (2006).CrossRefGoogle Scholar
54.Zhao, L.X., Campion, R.P., Fewster, P.F., Martin, R.W., Ber, B.Y., Kovarsky, A.P., Staddon, C.R., Wang, K.Y., Edmonds, K.W., Foxon, C.T., Gallagher, B.L., Semicond. Sci. Technol. 20, 369 (2005).CrossRefGoogle Scholar
55.Kodzuka, M., Ohkubo, T., Hono, K., Matsukura, F., Ohno, H., Ultramicroscopy 109, 644 (2009).CrossRefGoogle Scholar
56.Chiba, D., Matsukura, F., Ohno, H., Appl. Phys. Lett. 89, 162505 (2006).CrossRefGoogle Scholar
57.Miller, M.K., Russell, K.F., Thompson, K., Alvis, R., Larson, D.J., Microsc. Microanal. 13, 428 (2007).CrossRefGoogle Scholar
58.Gault, B., Vurpillot, F., Vella, A., Gilbert, M., Menand, A., Blavette, D., Deconihout, B., Rev. Sci. Instrum. 77, 043705/1 (2006).CrossRefGoogle Scholar
59.Bunton, J.H., Olson, J.D., Lenz, D.R., Kelly, T.F., Microsc. Microanal. 13, 418 (2007).CrossRefGoogle Scholar