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Combinatorial Synthesis and Evaluation of Functional Inorganic Materials Using Thin-Film Techniques

Published online by Cambridge University Press:  31 January 2011

Ichiro Takeuchi,
Robert Bruce van Dover and
Hideomi Koinuma
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Abstract

Novel phases of functional inorganic chemical systems can be efficiently explored using high-throughput thin-film fabrication techniques coupled with rapid characterization schemes. High-throughput investigation of thin-film materials has already led to the discovery of new dielectric and magnetic materials. In this article, we review various high-throughput thin-film synthesis/evaluation techniques and discuss examples of exciting discoveries and new applications of combinatorial techniques.

Keywords

advanced dielectricscombinatorial methodscomposition spreadsconcurrent x-ray diffractometerthin filmslaser molecular-beam epitaxyscanning evanescent microwave probetransparent magnetic materials.

Information

Type
Research Article
Information
MRS Bulletin , Volume 27 , Issue 4: Combinatorial Materials Science: What's New Since Edison? , April 2002, pp. 301 - 308
Copyright
Copyright © Materials Research Society 2002

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