Hostname: page-component-74656f9884-54qdv Total loading time: 0 Render date: 2026-11-10T03:49:21.158Z Has data issue: false hasContentIssue false
  • English
  • Français

Direct-Writing of Three-Dimensional Structures Using Laser-Based Processes

Published online by Cambridge University Press:  31 January 2011

M. Stuke ,
K. Mueller ,
T. Mueller ,
K. Williams ,
R. Oliver ,
D.A.A. Ohlberg ,
G. Fuhr  and
R. S. Williams
Get access

Abstract

Three-dimensional structures of selected materials can be written directly to the precise locations required using laser exposure of suitable gaseous precursor mixtures. Writing speeds exceeding 50 μm/s can be achieved. Examples presented in this work include the creation of a tiny time-of-flight laser ionization mass spectrometer, laserdriven movable micro-objects, and an ac electric-field microcage for storage, handling, and transferring small neutral objects in aqueous solution. The impact for lasercontrolled site-selective growth of carbon nanotube cables is demonstrated.

Information

Type
Research Article
Information
MRS Bulletin , Volume 32 , Issue 1: Laser Direct-Write Processing , January 2007 , pp. 32 - 39
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1.Lehmann, O. and Stuke, M., Science 270 (1995) p. 1644.Google Scholar
2.Ashkin, A., Biophys. J. 61 (1992) p. 569.CrossRefGoogle Scholar
3.Pohl, H.A., Dielectrophoresis (Cambridge University Press, Cambridge, UK, 1978).Google Scholar
4.Kaler, K.V. and Jones, T.B., Biophys. J. 57 (1990) p. 173.CrossRefGoogle Scholar
5.Mueller, T., Gradl, G., Howitz, S., Shirley, S.G., Schnelle, T., and Fuhr, G., Biosens. Bioelectron. 14 (1999) p. 247.CrossRefGoogle Scholar
6.Voldman, J., Toner, M., Gray, M.L., and Schmidt, M.A., J. Electrostat. 57 (2003) p. 69.CrossRefGoogle Scholar
7.Matsue, T., Matsumoto, N., Koike, S., and Uchida, I., Biochim. Biophys. Acta 1157 (1993) p. 332.CrossRefGoogle Scholar
8.Schnelle, T., Hagedorn, R., Fuhr, G., Fiedler, S., and Mueller, T., Biochim. Biophys. Acta 1157 (1993) p. 127.CrossRefGoogle Scholar
9.Fuhr, G., Reichle, C., Mueller, T., Kahlke, K., Schuetze, K., and Stuke, M., Appl. Phys. A 69 (1999) p. 611.Google Scholar
10.Wanke, M.C., Lehmann, O., Mueller, K., Wen, Q., and Stuke, M., Science 275 (1997) p. 1284.Google Scholar
11.Kawata, S., Sun, H.-B., Tanaka, T., and Takada, K., Nature 412 (2001) p. 697.CrossRefGoogle Scholar
12.Stuke, M., Mueller, K., Mueller, T., Hagedorn, R., Jaeger, M., and Fuhr, G., Appl. Phys. A 81 (2005) p. 915.CrossRefGoogle Scholar
13.Morgan, H. and Green, N.G., J. Electrostat. 42 (1997) p. 279.CrossRefGoogle Scholar
14.Kentsch, J., Duerr, M., Schnelle, T., Gradl, G., Mueller, T., Jaeger, M., Normann, A., and Stelzle, M., IEE Proc. Nanobiotechnol. 150 (2003) p. 82.CrossRefGoogle Scholar
15.Hughes, M.P., Morgan, H., Rixon, F.J., Burt, J.P.H., and Pethig, R., Biochim. Biophys. Acta 1425 (1998) p. 119.CrossRefGoogle Scholar
16.Kong, J., Zhou, C., Morpurgo, A., Soh, H.T., Quate, C.F., Marcus, C., and Dai, H., Appl. Phys. A 69 (1999) p. 305.CrossRefGoogle Scholar
17.Gavillet, J., Loiseau, A., Journet, C., Willaime, F., Ducastelle, F., and Charlier, J.C., Phys. Rev. Lett. 87 275504 (2001).Google Scholar
18.Gavillet, J., Loiseau, A., Ducastelle, F., Thair, S., Bernier, P., Stephan, O., Thibault, J., and Charlier, J.C., Carbon 40 (2002) p. 1649.Google Scholar
19.Jourdain, V., Paillet, M., Almairac, R., Loiseau, A., and Bernier, P., J. Phys. Chem. B 109 (2005) p. 1380.CrossRefGoogle Scholar
20.Kayastha, V.K., Yap, Y.K., Pan, Z., Ivanov, I.N., Puretzky, A.A., and Geohegan, D.B., Appl. Phys. Lett. 86 253106 (2005).Google Scholar
21.Kitamura, N. and Oshiyama, A., J. Phys. Soc. Jpn. 70 (2001) p. 1995.Google Scholar
22.Kroto, H.W., Heath, J.R., O'Brien, S.C.Curl, R.F., and Smalley, R.E., Nature 318 (1985) p. 162.CrossRefGoogle Scholar
23.Kratschmer, W., Lamb, L.D., Fostiropoulos, K., and Huffman, D.R., Nature 347 (1990) p. 354.Google Scholar
24.Kokai, F., Takahashi, K., Yudasaka, M., and Iijima, S., Appl. Phys. A 69 (1999) pp. 229–234 and references therein.Google Scholar
25.Wildoer, J.W.G., Venema, L.C., Rinzler, A.G., Smalley, R.E., and Dekker, C., Nature 391 (1998) p. 59.Google Scholar
26.Venema, L.C., Wildoer, J.W.G., Dekker, C., Rinzler, G.A., and Smalley, R.E., Appl. Phys. A 66 (1998) p. 153.CrossRefGoogle Scholar
27.Bozhko, A.D., Sklovsky, D.E., Nalimova, V.A., Rinzler, A.G., Smalley, R.E., and Fischer, J.E., Appl. Phys. A 67 (1998) p. 75.CrossRefGoogle Scholar
28.Hone, J., Llaguno, M.C., Nemes, N.M., Johnson, A.T., Fischer, J.E., Walters, D.A., Casavant, M.J., Schmidt, J., and Smalley, R.E., Appl. Phys. Lett. 77 (2000) p. 666.CrossRefGoogle Scholar
29.Smith, B.W., Benes, Z., Luzzi, D.E., Fischer, J.E., Walters, D.A., Casavant, M.J., Schmidt, J., and Smalley, R.E., Appl. Phys. Lett. 77 (2000) p. 663.Google Scholar
30.Grobert, N., Terrones, M., Trasobares, S., Kordatos, K., Terrones, H., Olivares, J., Zhang, J.P., Ph. Redlich, Hsu, W.K., Reeves, C.L., Wallis, D.J., Zhu, Y.Q., Hare, J.P., Pidduck, A.J., Kroto, H.W., and Walton, D.R.M., Appl. Phys. A 70 (2000) p. 175.Google Scholar
31.Lehmann, O. and Stuke, M., Appl. Phys. A 53 (1991) p. 343.Google Scholar
32.Lehmann, O. and Stuke, M., Mater. Lett. 21 (1994) p. 131.Google Scholar
33.Dai, H., Phys. World 13 (2000) pp. 43–47 and references therein.Google Scholar
34.Fan, S., Liang, W., Dang, H., Franklin, N., Tombler, T., Chapline, M., and Dai, H., Physica E 8 (2000) p. 179.Google Scholar
35.Venema, L.C., Wildoer, J.W.G., Tuinstra, H.L.J.T., Dekker, C., Rinzler, A.G., and Smalley, R.E., Appl. Phys. Lett. 71 (1997) p. 2629.Google Scholar
36.Mizoguti, E., Nihey, F., Yudasaka, M., Iijima, S., Ichihashi, T., and Nakamura, K., Chem. Phys. Lett. 321 (2000) p. 297.Google Scholar
37.Holzinger, M., Hirsch, A., Bernier, P., Duesberg, G.S., and Burghard, M., Appl. Phys. A 70 (2000) pp. 599–602 and references therein.Google Scholar
38.Rode, A.V., Gamaly, E.G., and Luther-Davies, B., Appl. Phys. A 70 (2000) p. 135.CrossRefGoogle Scholar
39.Gamaly, E.G., Rode, A.V., Maser, W.K., Muñoz, E., Benito, A.M., Martínez, M.T., and de la Fuente, G.F., Appl. Phys. A 70 (2000) p. 161.CrossRefGoogle Scholar
40.Puretzky, A.A., Geohegan, D.B., Fan, X., and Pennycook, S.J., Appl. Phys. A 70 (2000) p. 153.Google Scholar
41.Boul, P.J., Liu, J., Mickelson, E.T., Huffman, C.B., Ericson, L.M., Chiang, I.W., Smith, K.A., Colbert, D.T., Hauge, R.H., Margrave, J.L., and Smalley, R.E., Chem. Phys. Lett. 310 (1999) p. 367.CrossRefGoogle Scholar
42.Mark, G.I., Biro, L.P., Gyulai, J., Thiry, P.A., Lucas, A.A., and Lambin, P., Phys. Rev. B 62 (2000) pp. 2797–2805 and references therein.Google Scholar
43.Tsyboulski, D.A., Bachilo, S.M., and Weisman, R.B., Nano Lett. 5 (5) (2005) p. 975 and references within.CrossRefGoogle Scholar
44.Birnbaum, J. and Williams, R.S., Phys. Today 53 (2000) p. 38.Google Scholar
45.Kamins, T.I., Williams, R.S., Chen, Y., Chang, Y.L., and Chang, Y.A., Appl. Phys. Lett. 76 (2000) p. 562.Google Scholar
46.Chen, Y., Ohlberg, D.A.A., Medeiros-Ribeiro, G., Chang, Y.A., and Williams, R.S., Appl. Phys. Lett. 76 (2000) p. 4004.CrossRefGoogle Scholar
47.Service, R.F., Science 290 (2000) p. 246.CrossRefGoogle ScholarPubMed
48.Zandonella, C., New Scientist (May 5, 2001) p. 20.Google Scholar
49.Liang, Q., Gao, L.Z., Li, Q., Tang, S.H., Liu, B.C., and Yu, Z.L., Carbon 39 (2001) p. 897.Google Scholar
50.Zhou, C.W., Kong, J., Yenilmez, E., and Dai, H.J., Science 290 (2000) p. 1552.Google Scholar
51.Chen, J.H., Huang, Z.P., Wang, D.Z., Yang, S.X., Wen, J.G., and Ren, Z.R., Appl. Phys. A 73 (2001) p. 129.Google Scholar
52.Chiang, I.W., Brinson, B.E., Smalley, R.E., Margrave, J.L., and Hauge, R.H., J. Phys. Chem. B 105 (2001) p. 1157.Google Scholar
53.Hafner, H.H., Cheung, C.L., Oosterkamp, T.H., and Lieber, C.M., J. Phys. Chem. B 105 (2001) p. 743.Google Scholar
54.Meyer, R.R., Sloan, J., Dunin-Borkowski, R.E., Kirkland, A.I., Novotny, M.C., Bailey, S.R., Hutchison, J.L., and Green, M.L.H., Science 289 (2000) p. 1324.Google Scholar
55.Monteiro, O.R., Mammana, V.P., Salvadori, M.C., Ager, J.W., and Dimitrijevic, S., Appl. Phys. A 71 (2000) p. 121.CrossRefGoogle Scholar
56.Postma, H.W.C., Teepen, T., Yao, Z., Grifoni, M., and Dekker, C., Science 293 (2001) p. 76.Google Scholar
57.Sristava, D., Menon, M., and Chao, K., Computing Sci. Eng. 3 (2001) p. 42.Google Scholar
58.Rueckes, T., Kim, K., Joselevich, E., Tseng, G.Y., Cheung, C.L., and Lieber, C.M., Science 289 (2000) p. 94.Google Scholar
59.Zhang, Y. and Iijima, S., Philos. Mag. Lett. 80 (2000) p. 427.Google Scholar
60.Wu, W., Jung, G.Y., Olynick, D.L., Straznicky, J., Li, Z., Li, X., Ohlberg, D.A.A., Chen, Y., Wang, S.Y., Liddle, J.A., Tong, W.M., and Williams, R.S., Appl. Phys. A 80 (2005) p. 1173.Google Scholar