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Micromachining for rf Communications

Published online by Cambridge University Press:  31 January 2011

Darrin J. Young
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Extract

The increasing demand for wireless communication applications, such as cellular and cordless telephones, wireless data networks, and global positioning systems, motivates a growing interest in building miniature radio transceivers that can support multistandard capabilities. Such transceivers will greatly enhance the convenience and accessibility of various wireless services.

Information

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 331 - 332
Copyright
Copyright © Materials Research Society 2001

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References

1Young, D.J. and Boser, B.E. in Tech. Digest Solid-State Sensor and Actuator Workshop (Transducers Research Foundation, Cleveland, 1996) p. 86.Google Scholar
2Young, D.J.Malba, V.Ou, J.J.Bernhardt, A.F. and Boser, B.E. in Tech. Digest Solid-State Sensor and Actuator Workshop (Transducers Research Foundation, Cleveland, 1998) p. 128.Google Scholar
3Goldsmith, C.Yao, Z.Eshelman, S. and Denniston, D.IEEE Microwave and Guided Wave Lett., 8 (8) (1998) p. 269.CrossRefGoogle Scholar
4Yao, J.J. and Chang, M.F.Tech. Digest 1995 Int. Conf. Solid-State Sensors and Actuators 2 (1995) p. 384.CrossRefGoogle Scholar
5McGruer, N.E.Zavracky, P.M.Majumder, S. and Morrison, R. in Tech. Digest Solid-State Sensor and Actuator Workshop (Transducers Research Foundation, Cleveland, 1998) p. 132.Google Scholar
6Hyman, D.Lam, J.Warneke, B.Schmitz, A.Hsu, T.Y.Brown, J.Schaffner, J.Walston, A.Loo, R.Y.Mehregany, M. and Lee, J.Int. J. RF Microwave Comput.-Aided Eng. 9 (4) (1999) p. 348.3.0.CO;2-K>CrossRefGoogle Scholar
7Wang, K.Yu, Y.Wong, A.C. and Nguyen, C.T.C. “VHF Free-Free Beam High-Q Micromechanical Resonators,” Proc. 12th IEEE Int. Conf. MEMS (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1999) p. 453.Google Scholar
8Clark, J.R.Hsu, W.T. and Nguyen, C.T.C.Proc. IEEE IEDM 2000 (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 2000) p. 493.Google Scholar