Science Policy

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Type: Science Policy
Information: MRS Bulletin , Volume 30 , Issue 12: Fabrication of Sub-45-nm Device Structures , December 2005 , pp. 935 - 936

DOI: https://doi.org/10.1557/mrs2005.260 [Opens in a new window]

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Science Policy

Volume 30, Issue 12
DOI: https://doi.org/10.1557/mrs2005.260

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