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Analysis of Surface Structural Defects by Low Energy Electron Diffraction

Published online by Cambridge University Press:  15 February 2011

D. G. Welkie and
M. G. Lagally
D. G. Welkie
Affiliation:
Perkin-Elmer, Physical Electronics Division, Eden Prairie, MN (U.S.A.)
M. G. Lagally
Affiliation:
Department of Metallurgical and Mineral Engineering and Materials Science Center, University of Wisconsin-Madison, Madison, W153706 (U.S.A.)
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Extract

The characterization of surface structural defects by low energy electron diffraction is discussed. The identification of crystal mosaic structure, random strain, antiphase domains and steps is emphasized, and it is shown that they produce characteristic effects in the angular distribution of intensity in diffracted beams. Analytical models are summarized. They are also applicable to other surfacesensitive diffraction techniques such as reflection high energy electron diffraction and grazing angle X-ray diffraction. The quantitative analysis of these several types of defects is illustrated by measurements on the surface of an epitaxially grown Ag(111) film and on a sputter-etched and annealed GaAs(110) surface.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 10: Symposium C – Thin Films and Interfaces I , 1981, 227
Copyright
Copyright © Materials Research Society 1982

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References

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