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The Bio-Nano-Process: Making Semiconductor Devices Using Protein Supramolecules.

Published online by Cambridge University Press:  01 February 2011

Ichiro Yamashita
Ichiro Yamashita*
Affiliation:
Advanced Technology Research Laboratories, Matsushita Electric Industrial. Co., Ltd., Hikaridai 3-4, Seika, Kyoto, 619-0237, JapanCREST, Japan Science and Technology Agency, Honcho 4-1-8, Kawaguchi, Saitama 332-0012, JapanMaterials Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0101, Japan
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Abstract

The biology and semiconductor technology have progressed independently. There was a large distance between them and a substantial interdisciplinary research area was left untouched. Recently, this situation is gradually changing. Some researchers are stimulating semiconductor technology by introducing bio-molecules into the nano-fabrication process. We proposed a new process for fabricating functional nano-structure on a solid surface using protein supramolecules, which we named “Bio Nano Process” (BNP). We employed a cage-shaped protein, apoferritin and synthesized several kinds of nanoparticles (NP) in the apoferritin cavity. A two-dimensional array of them was made on the silicon wafer and this array was heat treated or UV/ozone treated. These processes produced a two-dimensional inorganic NP array on the silicon surface. The size of the NP is small enough to be used as quantum dot and the floating nanodots memory using this NP array is now under development. We also proposed another application of the BNP, making use of the obtained nanodot array as the nanometric etching mask. This was realized by employing the neutral beam etching and 7nm Si nano columns with high aspect ratio were fabricated. These experimental results demonstrate that the BNP can fabricate the inorganic nanostructure using protein supramolecules and the BNP opened up a biological path to nanoelectronics devices.

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