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Bonding at the CaF2-on-Si(111) Interface

Published online by Cambridge University Press:  25 February 2011

Marjorie A. Olmsteadt
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
R. D. Bringans
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
R. I. G. Uhrberg
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
R. Z. Bachrach
Affiliation:
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304
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Abstract

The bonding at the interface between CaF2 and Si(111) has been investigated using core-level photoemission spectroscopy. The results are discussed in terms of various structural models of the interface. The stable interface has a depletion of fluorine from the interface resulting in strong Si - Ca bonding.

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Type
Research Article
Copyright
Copyright © Materials Research Society 1987

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