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Chromium-Polyimide Interface Chemistry

Published online by Cambridge University Press:  21 February 2011

M. J. Goldberg
Affiliation:
IBM Thomas J. Watson Research Center P.O. Box 218, Yorktown Heights, NY 10598
J. G. Clabes
Affiliation:
IBM Thomas J. Watson Research Center P.O. Box 218, Yorktown Heights, NY 10598
A. Viehbeck
Affiliation:
IBM Thomas J. Watson Research Center P.O. Box 218, Yorktown Heights, NY 10598
C. A. Kovac
Affiliation:
IBM Thomas J. Watson Research Center P.O. Box 218, Yorktown Heights, NY 10598
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Abstract

We have studied the reactions occurring for the deposition of chromium onto pyromellitic dianhydride -4,4′-oxydianiline (PMDA-ODA) polyimide for a wide range of metal coverages, using X-ray photoelectron spectroscopy as well as solution studies involving model compounds. A multi-step, coverage-dependent, mechanism is proposed which includes an initial electron transfer from Cr to PMDA-ODA. followed by formation of Cr-O and and Cr-N polymer-bound intermediates, At higher metal coverage, Cr-oxides and Cr-nitrides are formed which may activate the polymer for subsequent formation of Cr-carbide. No evidence was obtained in support of a model involving initial formation of a π-arene complex between chromium atoms and PMDA-ODA. In the course of this work we have shown that similarities exist between the chemistry of metal atoms in condensed phases and the reactions occurring between metal atoms and surfaces.

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Type
Research Article
Copyright
Copyright © Materials Research Society 1988

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