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Development of Functional Materials by a Composition Spread Approach

Published online by Cambridge University Press:  17 March 2011

R. Cremer and
D. Neuschütz
R. Cremer
Affiliation:
Lehrstuhl für Theoretische Hüttenkunde Rheinisch-Westfälische Technische Hochschule Aachen 52056 Aachen, Germany
D. Neuschütz
Affiliation:
Lehrstuhl für Theoretische Hüttenkunde Rheinisch-Westfälische Technische Hochschule Aachen 52056 Aachen, Germany
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Abstract

In this paper, the deposition and characterization of laterally graded materials libraries (composition spread) is presented. The films have been deposited by reactive magnetron sputtering, using two or three metallic targets at a low angle to the substrate surface as well as a system of apertures. To illustrate the advantages of combinatorial approaches for the development of advanced materials, the multicomponent metastable hard coatings (Ti,Al)N and (Ti,Al,Si)N were investigated with respect to the relations between structure and composition on the one hand and the oxidation resistance of these coatings on the other.

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