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Direct Defect Imaging in the High Resolution Sem

Published online by Cambridge University Press:  21 February 2011

David C Joy
David C Joy*
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory+ , Oak Ridge, TN 37831 and EM Facility, University of Tennessee, Knoxville, TN 37996-0810
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Abstract

The theory of imaging crystallographic defects in solid specimens through the use of electron channeling contrast is reviewed and the necessary conditions for observation are deduced. It is shown that current high performance field emission scanning electron microscopes can meet these requirements and produce dislocation images from suitable materials.

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References

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