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Efficient Atomization Using MHz MEMS-Based Ultrasonic Nozzles

Published online by Cambridge University Press:  01 February 2011

Shirley C. Tsai,
Yu L. Song,
Yuan F. Chou,
J.H Cheng and
Chen S. Tsai
Shirley C. Tsai
Affiliation:
Dept. of Chemical Engineering, California State University, Long Beach, CA, USA
Yu L. Song
Affiliation:
Dept. of Physics, National Taiwan University, Taipei, TaiwanDept. of Electrical Eng. & Computer Science, University of California, Irvine, CA, USA
Yuan F. Chou
Affiliation:
Dept. of Mechanical Eng., National Taiwan University, Taipei, Taiwan
J.H Cheng
Affiliation:
Dept. of Mechanical Eng., National Taiwan University, Taipei, Taiwan
Chen S. Tsai
Affiliation:
Dept. of Electrical Eng. & Computer Science, University of California, Irvine, CA, USAInstitute of Electrooptical Eng., National Taiwan University, Taipei, Taiwan
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Abstract

This paper reports on the preliminary results of atomization using micro-electro-mechanical system (MEMS)-based 3-Fourier horn 0.5 MHz silicon ultrasonic nozzles. The droplets produced are monodisperse with 7.1 μm drop diameter in good agreement with that predicted by pure capillary wave atomization mechanism. This drop diameter is much smaller than that obtainable using conventional ultrasonic nebulizers operating at three times higher frequency.

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