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Electron Microscopy at Atomic Resolution

Published online by Cambridge University Press:  21 February 2011

R. Gronsky
R. Gronsky*
Affiliation:
National Center for Electron Microscopy Materials and Molecular Research Division Lawrence Berkeley Laboratory Berkeley, California 94720
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Abstract

The direct imaging of atomic structure in solids has become increasingly easier to accomplish with modern transmission electron microscopes, many of which have an information retrieval limit near 0.2nm point resolution. Achieving better resolution, particularly with any useful range of specimen tilting, requires a major design effort. This presentation describes the new Atomic Resolution Microscope (ARM), recently put into operation at the Lawrence Berkeley Laboratory. Capable of 0.18nm or better “interpretable” resolution over a voltage range of 400 kV to 1000kV with ± 40° biaxial specimen tilting, the ARM features a number of new electron-optical and microprocessor-control designs. These will be highlighted, and its atomic resolution performance demonstrated for a selection of inorganic crystals.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 31: Symposium N – Electron Microscopy of Materials , 1983, 1
Copyright
Copyright © Materials Research Society 2006

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References

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