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Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators

Published online by Cambridge University Press:  15 February 2011

A. David Johnson,
J. D. Busch,
Curtis A. Ray and
Charles Sloan
A. David Johnson
Affiliation:
TiNi Alloy Company, 1621 Neptune Drive, San Leandro, CA 94577
J. D. Busch
Affiliation:
TiNi Alloy Company, 1621 Neptune Drive, San Leandro, CA 94577
Curtis A. Ray
Affiliation:
Microflow Analytical Inc., 3987 South First Street, Unit K, Livermore CA 94550
Charles Sloan
Affiliation:
Microflow Analytical Inc., 3987 South First Street, Unit K, Livermore CA 94550
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Abstract

Thin film shape memory alloy has been integrated with silicon in a new actuation mechanism for micro-electro-mechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to fabricate shape memory alloy micro-actuators in silicon, and describes simple actuation mechanisms which have been fabricated and tested.

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References

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