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Factors Affecting Spatial Resolution for Compositional Analysis in Stem

Published online by Cambridge University Press:  25 February 2011

John B. Vander Sande and
Anthony J. Garratt-Reed
John B. Vander Sande
Affiliation:
Center for Materials Science and Enginerring, Massachusetts Inst. of Technology, Room 13-5025, Cambridge, Mass. 02139
Anthony J. Garratt-Reed
Affiliation:
Center for Materials Science and Enginerring, Massachusetts Inst. of Technology, Room 13-5025, Cambridge, Mass. 02139
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Abstract

This paper discusses the application of the scanning transmission electron microscope (STEM) to the detection of segregation at interfaces via the monitoring of X-rays generated when the incident electrons interact with the segregant. Issues of spatial resolution and minimum detectable concentration are discussed. Specific examples, emphasizing the importance of probe size, sample thickness, and sample orientation, are presented.

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