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Gmr Multihayer Patterned Structures

Published online by Cambridge University Press:  15 February 2011

L.V. Melo,
L.M. Rodrigues,
A.T. Sousa and
P.P. Freitas
L.V. Melo
Affiliation:
INESC, Rua Alves Redol 9, Apartado 13069, 1000 Lisboa, PortugalIST, Av. Rovisco Pais, 1000 Lisboa, Portugal
L.M. Rodrigues
Affiliation:
INESC, Rua Alves Redol 9, Apartado 13069, 1000 Lisboa, Portugal
A.T. Sousa
Affiliation:
INESC, Rua Alves Redol 9, Apartado 13069, 1000 Lisboa, PortugalIST, Av. Rovisco Pais, 1000 Lisboa, Portugal
P.P. Freitas
Affiliation:
INESC, Rua Alves Redol 9, Apartado 13069, 1000 Lisboa, PortugalIST, Av. Rovisco Pais, 1000 Lisboa, Portugal
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Abstract

Co-Cu-NiFe-Cu weakly coupled multilayers, were patterned into stripes with dimensions from 1×6μm2 to 2×20μm2. After proper biasing using a DC field created by an adjacent bias conductor, these structures show large linear field spans (±1500e), with MR values up to 6%. These can be used for current or position sensor applications. Sensor response to AC fields was studied up to 1Mhz, using the bias conductors as sources of the AC field. We find that the signal output is reduced above 10 to 100kHz. For comparison, sensors were also fabricated out Co-Cu AF-coupled multilayer (3×100μm2 structures) needed for field detection up to several kOe.

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References

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