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High Resolution Organic Thin Film Mapping for Process Control

Published online by Cambridge University Press:  25 February 2011

David Denenberg and
Austin R. Blew
David Denenberg
Affiliation:
Lehighton Electronics, Inc., P.O. Box 328, Lehighton, PA 18235 USA
Austin R. Blew
Affiliation:
Lehighton Electronics, Inc., P.O. Box 328, Lehighton, PA 18235 USA
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Abstract

ABSTRACT; This paper describes the use of advanced circuitry nondestructive eddy current techniques to map organic Thin Films. Surface profiles, contour maps and diameter scans are obtained from the process wafers tested providing the necessary information to control the processes for maximum yield.

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References

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