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Hydrogen and Lithium Diffusion in Amorphous Silicon

Published online by Cambridge University Press:  01 January 1993

Wolfhard Beyer and
Uwe Zastrow
Wolfhard Beyer
Affiliation:
ISI-PV, Forschungszentrum Juelich, D-5170 Juelich, Germany
Uwe Zastrow
Affiliation:
ISI-PV, Forschungszentrum Juelich, D-5170 Juelich, Germany
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Abstract

Diffusion processes of hydrogen and lithium in amorphous silicon are compared. While similarities in the diffusion energies and in a doping dependence exist, the charge state of the diffusing particles and the type of bonding of diffusing particles in traps differ. In case of Li diffusion, oxygen contamination plays an important role.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 297: Symposium A – Amorphous Silicon Technology - 1993 , 1993, 285
Copyright
Copyright © Materials Research Society 1993

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References

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