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Large Area Surface Treatment by Ion Beam Technology

Published online by Cambridge University Press:  03 September 2012

R. L. C. Wu and
W. Lanter
R. L. C. Wu
Affiliation:
K Systems Corporation, 1522 Marsetta Drive, Beavercreek, Ohio 45432
W. Lanter
Affiliation:
K Systems Corporation, 1522 Marsetta Drive, Beavercreek, Ohio 45432
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Abstract

An ultra high vacuum ion beam system, consisting of a 20 cm diameter Rf excilted (13.56 MHz) ion gun and a four-axis substrate scanner, has been used to modify large surfaces (up to 1000 cm2) of various materials, including; infrared windows, silicon nitride, polycrystalline diamond, 304 and 316 stainless steels, 440C and M50 steels, aluminum alloys, and polycarbonates; by depositing different chemical compositions of diamond-like carbon films. The influences of ion energy, Rf power, gas composition (H2/CH4 , Ar/CH4 and O2/CH4/H2), on the diamond-like carbon characteristics has been studied. Particular attention was focused on adhesion, environmental effects, IR(3–12 μm) transmission, coefficient of friction, and wear factors under spacelike environments of diamond-like carbon films on various substrates. A quadrupole mass spectrometer was utilized to monitor the ion beam composition for quality control and process optimization.

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References

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