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Low Energy Electron Diffraction During Pulsed Laser Annealing: A Time Resolved Surface Structural Study

Published online by Cambridge University Press:  22 February 2011

R. S. Becker,
G. S. Higashi and
J. A. Golovchenko
R. S. Becker
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
G. S. Higashi
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
J. A. Golovchenko
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974
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Abstract

Nanosecond structural changes in a crystal lattice during pulsed laser annealing have been measured using time-resolved Low Energy Electron Diffraction (LEED). LEED is both structure and surface (∼ 10Å) sensitive. Lattice temperatures can be extracted from Debye-Waller like extinction coefficients. Combining these with nanosecond time resolution provides a surface probe for short-time dynamical processes. The technique is used to observe the time evolution of a Ge(l11) surface during pulsed laser annealing. The results demonstrate rapid formation of a liquid layer and subsequent surface recrystallization and cooling.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 23 , 1983, 129
Copyright
Copyright © Materials Research Society 1984

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References

REFERENCES

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