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Measurement of Micromechanical Properties Using Atomic Force Microscope with Capacitative

Published online by Cambridge University Press:  22 February 2011

Gabi Neubauer,
Sidney R. Cohen and
Gary M. McClelland
Gabi Neubauer
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099
Sidney R. Cohen
Affiliation:
Chaim Weizmann Postdoctoral Fellow, IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099
Gary M. McClelland
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099
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Abstract

A new UHV atomic force microscope for the study of micromechanical properties is described. A capacitance technique is used, which enables simultaneous measurement of forces perpendicular and parallel to the surface (i.e., load and friction), and has low noise down to frequencies below 0.1 Hz. Preliminary results for Ir- and W-tips sliding on graphite and silicon, respectively, demonstrate the capabilities of this new instrument.

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