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Mechanical Properties Evolution of Polydimethylsiloxane During Crosslinking Process

Published online by Cambridge University Press:  26 February 2011

Yi Zhao and
Xin Zhang
Yi Zhao
Affiliation:
pillypolly@gmail.com, The Ohio State University, Department of Biomedical Engineering, 294 Bevis Hall, 1080 Carmack Road, Columbus, OH, 43210, United States
Xin Zhang
Affiliation:
xinz@bu.edu, Boston University, Department of Manufacturing Engineering, 15 Saint Mary's Street, Brookline, MA, 02446, United States
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Abstract

This paper reports mechanical properties evolution of polydimethylsiloxane (PDMS) during the crosslinking process. In this work, PDMS crosslinking was induced by mixing base prepolymer and curing agent at certain ratios. The liquid prepolymer was spun coated on a silicon wafer, and the curvature change of the wafer was measured continuously using a curvature measurement system. The relationship between the curvature change and typical mechanical properties was investigated using a bilayer model; and the evolution of the properties was derived, as a function of operational parameters. This work is expected to help better understanding of the crosslinking process and provide practical strategies for controlling the mechanical behavior of the resulting polymer structures, especially those for mechanical sensing applications.

Keywords

polymerelastic propertiesmicroelectro-mechanical (MEMS)

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References

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