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MEMS Metallization

Published online by Cambridge University Press:  17 March 2011

Christian Lohmann,
Knut Gottfried,
Andreas Bertz,
Danny Reuter,
Karla Hiller,
Michael Kuhn and
Thomas Gessner
Christian Lohmann
Affiliation:
Chemnitz University of Technology (CUT), Center of Microtechnologies Chemnitz, Germany
Knut Gottfried
Affiliation:
Fraunhofer IZM, Department MDE Chemnitz, Germany
Andreas Bertz
Affiliation:
Chemnitz University of Technology (CUT), Center of Microtechnologies Chemnitz, Germany
Danny Reuter
Affiliation:
Chemnitz University of Technology (CUT), Center of Microtechnologies Chemnitz, Germany
Karla Hiller
Affiliation:
Chemnitz University of Technology (CUT), Center of Microtechnologies Chemnitz, Germany
Michael Kuhn
Affiliation:
Chemnitz University of Technology (CUT), Center of Microtechnologies Chemnitz, Germany
Thomas Gessner
Affiliation:
Chemnitz University of Technology (CUT), Center of Microtechnologies Chemnitz, GermanyFraunhofer IZM, Department MDE Chemnitz, Germany
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Abstract

Silicon is the dominating material for the fabrication of MEMS devices,especially in high volume production. However, metals with their typicalproperties are used to enhance or enable the functionality of MEMS. Incontrast to microelectronic technologies, not only the electrical but alsothe mechanical and optical behavior of metals could be helpful. Newrequirements in MEMS technologies demand optimized processes inmetallization for the fabrication of microstructures.

This paper presents some metallization applications and related technologydevelopment in the field of MEMS.

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