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Microscratch Test for Ultra-Thin Films

Published online by Cambridge University Press:  16 February 2011

T. W. Wu
T. W. Wu*
Affiliation:
IBM Research Division, Almaden Research Center, San Jose, CA 95120.
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Abstract

In a microscratch test performed by using an upgraded microindenter, the normal load, tangential load, scratch length and acoustic emission, are monitored simultaneously during an entire scratch process for the purposes of measuring the critical load and studying the ffilure mechanisms of the deposited films. The adhesion strength, scratch hardness, fracture toughness and friction are the mechanical properties which are possible to obtain by using this technique. Results from aluminum, carbon and zirconia coatings will be discussed.

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