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Microwave Nitrudation of Silicon Compacts Utilizing a Temperature Gradient

Published online by Cambridge University Press:  25 February 2011

Jeffrey J. Thomas,
Hamlin M. Jennings and
D. Lynn Johnson
Jeffrey J. Thomas
Affiliation:
Depts. of Materials Science and Engineering and Civil Engineering Northwestern University, Evanston, IL 60208-3108
Hamlin M. Jennings
Affiliation:
Depts. of Materials Science and Engineering and Civil Engineering Northwestern University, Evanston, IL 60208-3108
D. Lynn Johnson
Affiliation:
Depts. of Materials Science and Engineering and Civil Engineering Northwestern University, Evanston, IL 60208-3108
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Abstract

Silicon compacts nitrided utilizing the temperature gradient inherent to microwave heating were more fully converted to silicon nitride than was possible with similar compacts nitrided isothermally. Although nitrogen depletion prevented the reaction rate in the center from exceeding that at the surface, the temperature gradient partially counteracted the effect of nitrogen depletion. Thus the microwave-heated specimens could be nitrided fully before the reduction in porosity that accompanies the reaction eliminated the diffusion of nitrogen into the compact.

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References

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