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Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on Ft-Ir In-Line Sensor

Published online by Cambridge University Press:  15 February 2011

Shaohua Liu,
Peter Solomon,
R. Carpio,
B. Fowler,
D. Simmons,
J. Wang,
R. Wise,
G. Imper,
N.B. Riley and
M. Moslehi
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Shaohua Liu
Affiliation:
Advanced Fuel Research, Inc., East Hartford, CT 06118.
Peter Solomon
Affiliation:
Advanced Fuel Research, Inc., East Hartford, CT 06118.
R. Carpio
Affiliation:
SEMATECH, Austin, TX 78741.
B. Fowler
Affiliation:
SEMATECH, Austin, TX 78741.
D. Simmons
Affiliation:
SEMATECH, Austin, TX 78741.
J. Wang
Affiliation:
Texas Instruments, Inc., Dallas, TX 75265.
R. Wise
Affiliation:
Texas Instruments, Inc., Dallas, TX 75265.
G. Imper
Affiliation:
Applied Materials, Inc., Santa Clara, CA 95054.
N.B. Riley
Affiliation:
Applied Materials, Inc., Santa Clara, CA 95054.
M. Moslehi
Affiliation:
CVC Products, Inc., Fremont, CA 94538.
N.M. Ravindra
Affiliation:
New Jersey Institute of Technology, NJ 08540.
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Abstract

This paper outlines our current approach to utilize infrared reflectance spectroscopy for thin film measurement in the semiconductor industry. The multi-layer thickness and doping concentration of IC wafers can be determined by a single angle, unpolarized infrared reflectance measurement performed using Fourier transform infrared spectrometer. A computer algorithm, which matches theoretical to measured infrared reflectance spectra, was successfully employed to determine multiple thin film properties.

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References

REFERENCES

1 Gross, P., “FT-IR Spectroscopy of Layered Structures-Thin Solid Films, Coated Substrates. Profiles, Multi-layers” SPIE Vol. 1575, 169-179.Google Scholar
2 Liu, S., Haigis, J., Ditaranto, M., Kinsella, K., Markham, J., Li, Q., Fenner, D.B., Solomon, P., Farquharson, S., and Morrison, P., “Process Monitor and Control of Integrated Circuit Manufacturing Using FT-IR spectroscopy” Proceeding of AWMA/SPIE Meeting, Mc lean, VA, (Nov. 7-10, 1994)Google Scholar
3 Carpio, R., Fowler, B., Simmons, D., Liu, S. and Solomon, P., “A Comparison of Infrared Reflectance Spectroscopy and Spectroscopic Ellipsometry for Polysilicon Film Process Control”, Proceeding of Electro-Chemical Society, Miami Beach, FL, Oct. 9-14, 1994 Google Scholar
4 Fowler, B., Simmons, D., Carpio, R., Liu, S., and Solomon, P., “The Measurement of Sub-Micron Epitaxial Layer Thickness and Free Carrier Concentration by Infrared Reflectance Spectroscopy” Proceeding of Electro-Chemical Society, Vol. 94–33, pg. 254, Miami Beach, FL, Oct. 9-14, 1994 Google Scholar
5 Liu, S., et. al., patent pending.Google Scholar
6 Trade Mark of Applied Materials, Inc. Google Scholar
7 Wang, C. J., Wise, R., Liu, S., Haigis, J., Farquharson, S., and Fowler, B., “In-line FT-IR for Epitaxial Silicon Film Thickness Measurement on An Applied Materials Centura Cluster Tool” Proceeding of Annual Semiconductor Manufacture Conference, Boston, MA, Nov. 14-17, 1994 Google Scholar