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Nano Carbon 1D and 2D Nanomechanical Resonators

Published online by Cambridge University Press:  04 June 2014

Jaesung Lee,
Philip X.-L. Feng and
Anupama B. Kaul
Jaesung Lee*
Affiliation:
Electrical Engineering, Case Western Reserve University, Cleveland, OH 44106, USA
Philip X.-L. Feng*
Affiliation:
Electrical Engineering, Case Western Reserve University, Cleveland, OH 44106, USA
Anupama B. Kaul*
Affiliation:
Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA 91109, USA
*
*Emails: jaesung.lee@case.edu; philip.feng@case.edu; anu.kaul@jpl.nasa.gov
*Emails: jaesung.lee@case.edu; philip.feng@case.edu; anu.kaul@jpl.nasa.gov
*Emails: jaesung.lee@case.edu; philip.feng@case.edu; anu.kaul@jpl.nasa.gov
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Abstract

We demonstrate one-dimensional (1D) and two-dimensional (2D) resonant nanoelectromechanical systems (NEMS) derived from nano carbon materials, where the resonance frequency and the quality (Q) factor of the devices are measured experimentally using ultrasensitive optical interferometry. The 1D nano carbon resonators are formed using carbon nanofibers (CNFs) which are synthesized using a plasma-enhanced chemical vapor deposition (PECVD) process, while the 2D nanocarbon resonators are based on CVD grown graphene. The CNFs are prototyped into few-μm-long cantilever-shaped 1D resonators, where the resonance frequency and Qs are extracted from measurements of the undriven thermomechanical noise spectrum. The thermomechanical noise measurements yield resonances in the ∼3–15 MHz range, with Q of ∼200–800. Significant changes in resonance characteristics are observed due to electron beam induced amorphous carbon deposition on the CNFs, which suggests that 1D CNF resonators have strong prospects for ultrasensitive mass detection. We also present NEMS resonators based on 2D graphene nanomembranes, which exhibit robust undriven thermomechanical resonances for the extraction of ultrasmall strain levels.

Keywords

actuatorCnanoscale

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Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1693: Symposium DD – Silicon Carbide‒Materials, Processing and Devices , 2014, mrss14-1693-dd08-01
Copyright
Copyright © Materials Research Society 2014 

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References

REFERENCES

Feng, P.X.-L., Nanoelectromechanical switching devices: scaling toward ultimate energy efficiency and longevity (invited talk), The 3rd Berkeley Symposium on Energy Efficient Electronic Systems (E3S), Berkeley, CA, USA, October 28-29 (2013), pp. 1–2, DOI: 10.1109/E3S.2013.6705881.Google Scholar
Naik, A.K., Hanay, M.S., Hiebert, W.K., Feng, X.L., Roukes, M.L., Towards single-molecule nanomechanical mass spectrometry, Nature Nanotech. 4, 445–450 (2009).CrossRefGoogle ScholarPubMed
Rugar, D., Budakian, R., Mamin, H.J., Chui, B.W., Single spin detection by magnetic resonance force microscopy, Nature 430, 329–332 (2004).CrossRefGoogle ScholarPubMed
Rocheleau, T., Ndukum, T., Macklin, C., Hertzberg, J.B., Clerk, A.A., Schwab, K.C., Preparation and detection of a mechanical resonator near the ground state of motion, Nature 463, 72–75 (2010).CrossRefGoogle Scholar
Feng, X.L., He, R., Yang, P., Roukes, M.L., Very high frequency silicon nanowire electromechanical resonators, Nano Lett. 7, 1953–1959 (2007).CrossRefGoogle Scholar
Huang, X.M.H., Feng, X.L., Zorman, C.A., Mehregany, M., Roukes, M.L., VHF, UHF and microwave frequency nanomechanical resonators, New Journal of Physics 7, 247 (2005).CrossRefGoogle Scholar
Bunch, J.S., van der Zande, A.M., Verbridge, S.S., Frank, I.W., Tanenbaum, D.M., Parpia, J.M., Craighead, H.G., McEuen, P.L., Electromechanical resonators from graphene sheets, Science 315, 490–493 (2007).CrossRefGoogle ScholarPubMed
Rueckes, T., Kim, K., Joselevich, E., Tseng, G.Y., Cheung, C.-L., Lieber, C.M., Carbon nanotube-based nonvolatile random access memory for molecular computing, Science 289, 94–97 (2000).CrossRefGoogle ScholarPubMed
Moser, J., Güttinger, J., Eichler, A., Esplandiu, M.J., Liu, D.E., Dykman, M.I., Bachtold, A., Ultrasensitive force detection with a nanotube mechanical resonator, Nature Nanotech. 8, 493–496 (2013).CrossRefGoogle ScholarPubMed
Eriksson, A., Lee, S., Sourab, A., Issacsson, A., Kaunisto, R., Kinaret, J.M., Campbell, E.E.B., Direct transmission detection of tunable mechanical resonance in an individual carbon nanofiber relay, Nano Lett. 8, 1224–1228 (2008).CrossRefGoogle Scholar
Kaul, A.B., Wong, E.W., Epp, L., Hunt, B.D., Electromechanical carbon nanotube switches for high-frequency applications, Nano Lett. 6, 942–947 (2006).CrossRefGoogle ScholarPubMed
Kaul, A.B., Megerian, K.G., Jennings, A.T., Greer, J.R., In situ characterization of vertically oriented carbon nanofibers for three-dimensional nano-electro-mechanical device applications, Nanotechnology 21, 315501 (2010).CrossRefGoogle ScholarPubMed
Lee, J., Feng, P.X.-L., Kaul, A.B., Characterization of plasma synthesized vertical carbon nanofibers for nanoelectronics applications, MRS Proceedings 1451 ( 2012 MRS Spring Meeting, Symposium EE – Nano Carbon Materials & Devices, San Francisco, CA, April 9-13,2012), pp. 117–122, DOI: 10.1557/opl.2012.922.CrossRefGoogle Scholar
Lee, G.-H., Cooper, R.C., An, S.J., Lee, S., van der Zande, A., Petrone, N., Hammerberg, A.G., Lee, C., Crawford, B., Oliver, W., Kysar, J.W., Hone, J., High-strength chemical-vapor-deposited Graphene and grain boundaries, Science 340, 1073–1076 (2013).CrossRefGoogle ScholarPubMed
Lee, J., Feng, P.X.-L., High frequency graphene nanomechanical resonators and transducers, Proc. IEEE International Frequency Control Symposium (IFCS 2012), Baltimore, MD, USA, May 21-24 (2012), pp. 1–7, DOI: 10.1109/FCS.2012.6243742.Google Scholar