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A New Approach to Atomic Force Microscopy

Published online by Cambridge University Press:  21 February 2011

Nabil M. Amer
Nabil M. Amer*
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598
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Abstract

A highly sensitive and simple optical method for detecting the cantilever deflection in atomic force microscopy is described. The method was incorporated in an atomic force microscope and imaging and force measurements, in ultra-high vacuum and in air, were sucessfully performed.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 139: Symposium R – High Resolution Microscopy of Materials , 1989, 229
Copyright
Copyright © Materials Research Society 1989

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References

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