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Optical Characteristics of Planar Waveguides in Simox Structures

Published online by Cambridge University Press:  15 February 2011

G T Reed,
A G Rickman,
B L Weiss,
F Namavar,
E Cortesi and
R A Soref
G T Reed
Affiliation:
Department of Electronic and Electrical Engineering (joint appointment with the Department of Physics) University of Surrey Guildford, Surrey GU2 5XH, UK
A G Rickman
Affiliation:
Department of Electronic and Electrical Engineering (joint appointment with the Department of Physics) University of Surrey Guildford, Surrey GU2 5XH, UK
B L Weiss
Affiliation:
Department of Electronic and Electrical Engineering (joint appointment with the Department of Physics) University of Surrey Guildford, Surrey GU2 5XH, UK
F Namavar
Affiliation:
Department of Electronic and Electrical Engineering (joint appointment with the Department of Physics) University of Surrey Guildford, Surrey GU2 5XH, UK
E Cortesi
Affiliation:
Spire Corporation Patriots Park Bedford, MA 01730
R A Soref
Affiliation:
Rome Laboratory Hanscom Air Force Base MA 01731
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Abstract

Results are presented for the propagation loss of planar optical waveguides fabricated in SIMOX structures with Si overlayers whose thickness varies from 0.57 μm to 6.0 μm. The results demonstrate that thick Si overlayers are required to produce propagation losses below 1 dB/cm. In addition, the results of the coupling between two vertically integrated waveguides formed using two buried SiO2 layers are also reported.

Information

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 244: Symposium J – Optical Waveguide Materials , 1991, 387
Copyright
Copyright © Materials Research Society 1992

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References

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