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Principles of Ion Mixing

Published online by Cambridge University Press:  15 February 2011

S. Matteson and
M.-A. Nicolet
S. Matteson
Affiliation:
Texas Instruments Incorporated, P.O. Box 225936 MS–147, Dallas, TX 75265, USA
M.-A. Nicolet
Affiliation:
California Institute of Technology, Pasadena, CA 91125, USA
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Abstract

Several mechanisms can cause atomic relocation as a result of ion irradiation. Experiments are reviewed that provide information on the atomic redistribution within a solid. Predictions of different models, when compared with these results, shed light on the dominant processes. Sucesses and problem areas are discussed and possible practical applications of the results are explored.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 7 , 1981, 3
Copyright
Copyright © Materials Research Society 1982

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References

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