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A Silicon-Based Shape Memory Alloy Microvalve

Published online by Cambridge University Press:  15 February 2011

Curtis A. Ray,
Charles L. Sloan,
A. David Johnson,
John D. Busch and
Bruce R. Petty
Curtis A. Ray
Affiliation:
Microflow Analytical, Inc., 3987 First St., Livermore, CA
Charles L. Sloan
Affiliation:
Microflow Analytical, Inc., 3987 First St., Livermore, CA
A. David Johnson
Affiliation:
TiNi Alloy Company, 1144 65th St., Oakland, CA
John D. Busch
Affiliation:
TiNi Alloy Company, 1144 65th St., Oakland, CA
Bruce R. Petty
Affiliation:
TiNi Alloy Company, 1144 65th St., Oakland, CA
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Abstract

A new actuator for silicon micro-valves has been developed and tested. A thin film shape memory alloy provides for large deflections with high speed, low power, and small size. The actuator is batch fabricated with planar processes.

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References

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