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Solid Solution Alloy Effects on Microstructure and Indentation Hardness in Pt-Ru Thin Films

Published online by Cambridge University Press:  18 March 2011

Seungmin Hyun,
Oliver Kraft and
Richard P. Vinci
Seungmin Hyun
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, Pennsylvania 18015
Oliver Kraft
Affiliation:
Max Planck Institut fur Metallforschung, Stuttgart, Germany
Richard P. Vinci
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, Pennsylvania 18015
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Abstract

The elastic moduli and flow stresses of as-deposited Pt and Pt-Ru solid solution thin films were investigated by the nanoindentation method. The influence of solid solution alloying was explored by depositing Pt-Ru solid solution thin films with various compositions onto Si substrates. The 200 nm films were prepared by DC magnetron cosputtering with a Ru composition range from 0 to 20wt%. As expected, the modulus and the flow stress both increased significantly with an increase in Ru. The experimental results compare favorably to predictions based on a simple dislocation motion model consisting of three strengthening terms: substrate constraint, grain size strengthening and solid solution strengthening.

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References

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