Hostname: page-component-7b7567c8c-tnzcf Total loading time: 0 Render date: 2026-11-12T05:41:18.637Z Has data issue: false hasContentIssue false
  • English
  • Français

Surface Effects During Ion Beam Processing of Materials

Published online by Cambridge University Press:  21 February 2011

R.S. Averback,
Mai Ghaly and
H. Zhu
R.S. Averback
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA; M.J. Caturla and L. Marques, T. Diaz de la Rubia, Chemistry and Materials Science Directorate, Lawrence Livermore National Laboratory,Livermore CA
Mai Ghaly
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA; M.J. Caturla and L. Marques, T. Diaz de la Rubia, Chemistry and Materials Science Directorate, Lawrence Livermore National Laboratory,Livermore CA
H. Zhu
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA; M.J. Caturla and L. Marques, T. Diaz de la Rubia, Chemistry and Materials Science Directorate, Lawrence Livermore National Laboratory,Livermore CA
Get access

Abstract

Microstructural changes of surfaces during ion implantation have been investigated on the atomic level by molecular dynamics computer simulations. Unlike past surface studies, which have been focused on the problem of sputtering, the current work examines the effects of collective materials response on surface topography. Collective behavior has been noted for the crystal interior in the context of thermal spikes, but we show here that it can lead to far more dramatic consequences at the surface. The investigation includes implantation in several metals, but emphasizing Pt, Si and Ge. In addition, the study includes the first simulations of implantations of a metallic glass, CuTi, and amorphous Si.

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1 Gibson, J.B., Goland, A.N., Milgram, M., and Vineyard, G.H., Phys. Rev. 120, 1229.Google Scholar
2 Averback, R.S., Diaz de la Rubia, T., Hsieh., H. and Benedek, R., Nucl. Instr. and Meth. B 59/60 709 (1991); D.J. Bacon and T. Diaz de la Rubia, J. Nucl. Mater. 216, 275 (1994).Google Scholar
3 See e.g., Chason, E., Mayer, T.M., Kellerman, B.K., Mcllroy, D.T., and Howard, A.J., Phys. Rev. Lett. 72, 3040 (1994).Google Scholar
4 See e.g., Wilson, I.H., Zheng, N.J., Knipping, U., and Tsong, I.S.T., Phys. Rev. 38, 8444(1988).Google Scholar
5 Ghaly, M. and Averback, R.S., Phys. Rev. Lett. 72, 364 (1994).Google Scholar
6 Teichert, C., Hohage, M., Michely, Th. and Comsa, G., Phys. Rev. Lett.,72, 1682 (1994).Google Scholar
7 MOLDYCASK is a derivative of MOLDY, see M.W. Finnis, Atomic Energy Authority Report No. AERE-R-13182, (1988).Google Scholar
8 DYNAMO is from Sandia National LaboratoryGoogle Scholar
9 Foiles, S.M., Baskes, M.I., and Daw, M.S., Phys. Rev. B 33, 7983 (1986).Google Scholar
10 Stillinger, F.H. and Weber, T.A., Phys. Rev. B31, 5262 (1985).Google Scholar
11 Ziegler, J., Biersack, J.P., and Littmark, U., in Stopping and Range of Ions in Solids, (Pergamon Press, New York, 1985) Vol. 1.Google Scholar
12 Ghaly, M., Smith, A., Benedek, R., and Averback, R.S., unpublished.Google Scholar
13 Daw, M.S., Foiles, S.M. and Baskes, M.I., Mats. Sci. Rep. 9 251 (1993).Google Scholar
14 Averback, R.S. and Ghaly, Mai, J. Appl. Phys. 76, 3908 (1994).Google Scholar
15 Morganstern, M., Michely, Th., and Comsa, G., private communication.Google Scholar
16 Merkle, K.L. and Jäger, W., Philos Mag. A. 44, 741 (1981)Google Scholar
17 Bellon, P., Chey, S. J., Van Nostrand, J.E., Ghaly, M., Cahill, D.G., and Averback, R.S., Surface Science, 339, 135 (1995).Google Scholar
18 Coon., S.R. Callaway, W.F. and Pellin, M.J., Nucl. Instr. and Meth. B 90 518 (1994).Google Scholar
19 See e.g., Merkle, K.L., in Radiation Damage in Metals, ed. Peterson, N.L. and Harkness, S.D., (American Society of Metals, Metals Park, 1976), p.58.Google Scholar
20 Caturla, M.J. and Marques, L., and Diaz de la Rubia, T., unpublished.Google Scholar