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Surface Stress, Morphological Development, and Dislocation Nucleation During Strained-Layer Epitaxy

Published online by Cambridge University Press:  15 February 2011

D. E. Jesson,
S. J. Pennycook,
J.-M. Baribeau and
D. C. Houghton
D. E. Jesson
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6030
S. J. Pennycook
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6030
J.-M. Baribeau
Affiliation:
Institute for Microstructural Sciences, National Research Council of Canada, Ottawa K1A OR6, Canada
D. C. Houghton
Affiliation:
Institute for Microstructural Sciences, National Research Council of Canada, Ottawa K1A OR6, Canada
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Abstract

Utilizing Marker layer experiments and Z-contrast imaging, we have observed the formation of surface cusps during SixGe1−x alloy growth. The formation of cusps can be understood in terms of stress-driven surface diffusion, and we consider the large stress build-up at the cusp tip as a potential source for the nucleation of misfit dislocations.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 317: Symposium B – Mechanisms of Thin Film Evolution , 1993, 297
Copyright
Copyright © Materials Research Society 1994

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References

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