Hostname: page-component-7b7567c8c-wxvwp Total loading time: 0 Render date: 2026-11-14T22:53:47.162Z Has data issue: false hasContentIssue false
  • English
  • Français

Theoretical modeling for laser cleaning of micro-particles from solid surface

Published online by Cambridge University Press:  10 February 2011

Y. F. Lu,
W. D. Song,
M. H. Hong,
D. S. H. Chan and
T. S. Low
Y. F. Lu
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
W. D. Song
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
M. H. Hong
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
D. S. H. Chan
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
T. S. Low
Affiliation:
Laser Microprocessing Laboratory Department of Electrical Engineering and Data Storage Institute, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260
Get access

Abstract

In laser cleaning of micro-particles from solid surface, the adhesion force between the particles and the substrate surface and the thermal expansion of both particles and substrate play important roles in determining the threshold laser fluence. Taking Van der Waals force and cleaning force due to fast thermal expansion of particles and substrate surface induced by pulsed laser irradiation into account, a cleaning model was established for removal of tiny particles from substrate surfaces. The cleaning condition and cleaning threshold can be obtained from this model. This model can qualitatively and quantitatively predict how the laser cleaning process depending on laser incident direction, laser wavelength, particle size, particle material and substrate material. Theoretical predictions have been verified by the experimental results. Laser cleaning of micro-particle has wide applications in microelectronics and magnetic recording industries.

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1. Duffalo, M. and Monkowski, J.R., Solid State Technol Mar. 109 (1984).Google Scholar
2. Hattori, T., SolidState Technol. July, sl(1990).Google Scholar
3. Hiller, B. and Singh, G.P., IEEE Trans. Magn. 30, 1499 (1994).Google Scholar
4. Jette, A.N. and Benson, R.C., J. Appl. Phys., 75(5), 3130 (1994).Google Scholar
5. Bardina, J., “Methods for surface particle removal: A comparative study,” in Particles on surfaces 1, Mittal, K.L., Ed. New York:Plenum, 1988.Google Scholar
6. Tam, A.C., Leung, W.P., Zapka, W. and Ziemlich, W., J.. Appl. Phys. 71(7), 3515(1992).Google Scholar
7. Lu, Y.F., Takai, M., Komuro, S., Shiokawa, T. and Aoyagi, Y., Appl. Phys., A 59, 281 (1994).Google Scholar
8. Lu, Y.F., Komuro, S. and Aoyagi, Y., Jpn. J. Appl. Phys., Part 1, 33(8), 4691 (1994).Google Scholar
9. Lu, Y.F., Song, W.D., Hong, M.H., Teo, B.S., Chong, T.C. and Low, T.S., J. Appl. Phys., 80(1), 499(1996).Google Scholar
10. Zapka, W., Ziemlich, W., Tam, A.C., Appl. Phys. Lett. 58(20), 2217(1991).Google Scholar
11. Imen, K., Lee, S.J. and Allen, S.D., Appl. Phys. Lett., 58(2), 203(1991).Google Scholar
12. Park, H.K., Grigoropoulos, C.P., Leung, W.P., Tam, A.C., IEEE Trans. on Components, Packaging and Manufacturing Technology, 17(4), 631(1994).Google Scholar
13. Kelley, J.D. and Hovis, F.E., Microelectronic Engineering 20, 159 (1993).Google Scholar
14. Mittal, K.L., Particles on Surfaces, Marcel Dekker, Inc., New York, 1995, p.1, p.33.Google Scholar
15. Mittal, K.L., Particles on Surfaces, vol. 1, Plenum Press, New York, 1988, p.77, p. 129, p. 179.Google Scholar
16. Burgreen, D., Elements of Thermal Stress Analysis, C. P.Press, Jamaica, New York, 1971, ppl-28, pp 89–91.Google Scholar
17. Bhattacharya, D., Singh, R.K. and Holloway, P.H., J. Appl. Phys. 70(10), 5433(1991).Google Scholar
18. Palik, E.D., Handbook of Optical Constants of Solids, Academic Press, Orlando, 1985, pp. 390–397.Google Scholar
19. Touloukian, Y.S., Thermophysical Properties of Matter, The TPRC Series Vols. 1–13 (IFI/Plenum, New York, 1978).Google Scholar
20. Smithells, C.J., Metals Reference Book, Vol III, Butterworths, London, 1967, pp.780.Google Scholar