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X-ray Diffraction Study of the Mechanical Elastic Properties ofNanometric W/Cu Multilayers

Published online by Cambridge University Press:  26 February 2011

Pascale Villain,
Baptiste Girault,
Pierre-Olivier Renault,
Eric Le Bourhis,
Philippe Goudeau and
Frederic Badawi
Pascale Villain
Affiliation:
pascale.villain@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France, +33549496646, +33549496692
Baptiste Girault
Affiliation:
baptiste.girault@etu.univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Pierre-Olivier Renault
Affiliation:
pierre.olivier.renault@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Eric Le Bourhis
Affiliation:
eric.le.bourhis@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Philippe Goudeau
Affiliation:
philippe.goudeau@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
Frederic Badawi
Affiliation:
frederic.badawi@univ-poitiers.fr, University of Poitiers, Laboratoire de Métallurgie Physique, SP2MI, Boul. Marie et Pierre Curie, Futuroscope Chasseneuil, 86962, France
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Abstract

The mechanical behavior of W/Cu multilayers with a period of 24 nm and a 1/3W/Cu thickness ratio prepared by magnetron sputtering was analyzed using amethod combining X-ray diffraction and tensile testing. Tests were performedboth with a conventional and a synchrotron light source to analyze theelastic response of the system. Comparison between the strain-load curvesobtained in both experimental conditions and estimated curves clearly showsthat high quality synchrotron measurements are a preliminary condition forsize-effect studies. Moreover, cyclic tests were used to determine theelastic domain of each material and compare their mechanical responses.Plastic strain was observed in copper while tungsten layers were stillelastically strained until cracks appeared.

Keywords

elastic propertiesx-ray diffraction (XRD)nanoscale

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